Inventor
FURUYA HAJIME
JP6 patents
⚠️ This page may combine multiple inventors who share the name “FURUYA HAJIME”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
4 patentsUS7827931B2Nov 9, 2010
Plasma processor electrode and plasma processor
TOKYO ELECTRON LTD27 citations91
US9263268B2Feb 16, 2016
Joining device, joining system and joining method
TOKYO ELECTRON LTD4 citations70
US9694572B2Jul 4, 2017
Bonding device and bonding system
TOKYO ELECTRON LTD3 citations64
US7231321B2Jun 12, 2007
Method of resetting substrate processing apparatus, storage medium storing program for implementing the method, and substrate processing apparatus
TOKYO ELECTRON LTD3 citations58