Inventor · disambiguated record
Michael L. Passow
Also filed as: PASSOW MICHAEL L
12 granted patents·1 pending application·258 citations·filing 1992–2016
92Inventor score
Files withIBM13
Top patents by PatentIndex Score
13 records- 0192US5308414AMethod and apparatus for optical emission end point detection in plasma etching processesIBM·Filed 1992·Granted May 3, 1994·79 cites·16 claims
- 0291US9395219B1Ring-based monitoring of sensor mesh networksIBM·Filed 2016·Granted Jul 19, 2016·5 cites·20 claims
- 0386US9575554B1Dynamic time sliced sensor sampling for reduced power consumptionIBM·Filed 2015·Granted Feb 21, 2017·5 cites·20 claims
- 0480US5811357AProcess of etching an oxide layerIBM·Filed 1997·Granted Sep 22, 1998·57 cites·13 claims
- 0565US6268226B1Reactive ion etch loading measurement techniqueIBM·Filed 1999·Granted Jul 31, 2001·31 cites·19 claims
- 0661US6207353B1Resist formulation which minimizes blistering during etchingIBM·Filed 1997·Granted Mar 27, 2001·28 cites·20 claims
- 0751US7570174B2Real time alarm classification and method of useIBM·Filed 2007·Granted Aug 4, 2009·1 cites·2 claims
- 0851US6102776AApparatus and method for controlling polishing of integrated circuit substratesIBM·Filed 1999·Granted Aug 15, 2000·15 cites·17 claims
- 0951US5534066AFluid delivery apparatus having an infrared feedline sensorIBM·Filed 1993·Granted Jul 9, 1996·14 cites·15 claims
- 1049US5492718AFluid delivery apparatus and method having an infrared feedline sensorIBM·Filed 1994·Granted Feb 20, 1996·11 cites·16 claims
- 1146US10120103B2Intelligent/autonomous thermocline mapping and monitoring for marine and freshwater applicationsIBM·Filed 2015·Granted Nov 6, 2018·0 cites·20 claims
- 1246US6296717B1Regeneration of chemical mechanical polishing pads in-situIBM·Filed 1999·Granted Oct 2, 2001·12 cites·14 claims
- 1341US2010014748A1Method and apparatus for real time fault detection in high speed semiconductor processesIBM·Filed 2008·Application pending·0 cites
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