Inventor

MA JENG-SHIN

TW2 patents

Patents

2 patents

US9864270B2Jan 9, 2018

Pellicle and method for manufacturing the same

TAIWAN SEMICONDUCTOR MFG CO LTD3 citations71

US12009242B2Jun 11, 2024

Wafer transport container

TAIWAN SEMICONDUCTOR MFG CO LTD2 citations69