Inventor
BERCAW CRAIG
US5 patents
Patents
5 patentsUS5496142AMar 5, 1996
Slotted conical spring washer
APPLIED MATERIALS INC75 citations95
US5811195ASep 22, 1998
Corrosion-resistant aluminum article for semiconductor processing equipment
APPLIED MATERIALS INC49 citations93
US6242111B1Jun 5, 2001
Anodized aluminum susceptor for forming integrated circuit structures and method of making anodized aluminum susceptor
APPLIED MATERIALS INC20 citations90
US5705225AJan 6, 1998
Method of filling pores in anodized aluminum parts
APPLIED MATERIALS INC33 citations88
US6123097ASep 26, 2000
Apparatus and methods for controlling process chamber pressure
APPLIED MATERIALS INC13 citations71