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Inventor
GOETSCHKES UDO
DE
2 patents
Patents
2 patents
US10468248B2
Nov 5, 2019
Method for producing a self-aligning masking layer
INFINEON TECHNOLOGIES AG
0 citations
43
US6982495B2
Jan 3, 2006
Mark configuration, wafer with at least one mark configuration, and a method of producing at least one mark configuration
INFINEON TECHNOLOGIES AG
0 citations
41