Inventor
SHIRAHATA TAKAHIRO
JP16 patents
⚠️ This page may combine multiple inventors who share the name “SHIRAHATA TAKAHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ORITA HIROYUKI
4 patentsUS10121931B2Nov 6, 2018
Film formation device
ORITA HIROYUKI2 citations70
US10016785B2Jul 10, 2018
Oxide film deposition method and oxide film deposition device
ORITA HIROYUKI2 citations70
US9103028B2Aug 11, 2015
Method for forming metal oxide film, metal oxide film, and apparatus for forming metal oxide film
ORITA HIROYUKI0 citations49
US9574271B2Feb 21, 2017
Method for forming metal oxide film, metal oxide film and apparatus for forming metal oxide film
ORITA HIROYUKI0 citations48
TOSHIBA MITSUBISHI ELEC IND
4 patentsUS10456802B2Oct 29, 2019
Atomizing apparatus
TOSHIBA MITSUBISHI ELEC IND1 citations62
US11124877B2Sep 21, 2021
Film forming device including a detachable bottom plate for forming a film on a substrate
TOSHIBA MITSUBISHI ELEC IND0 citations50
US10544509B2Jan 28, 2020
Film forming device
TOSHIBA MITSUBISHI ELEC IND0 citations40
US10458017B2Oct 29, 2019
Film-forming apparatus to form a film on a substrate
TOSHIBA MITSUBISHI ELEC IND0 citations40
TOSHIBA MITSUBISHI ELECTRIC INDUSTRIAL SYSTEMS CORP
3 patentsUS11075318B2Jul 27, 2021
Buffer layer film-forming method and buffer layer
TOSHIBA MITSUBISHI ELECTRIC INDUSTRIAL SYSTEMS CORP0 citations62
US10118191B2Nov 6, 2018
Film forming apparatus
TOSHIBA MITSUBISHI ELECTRIC INDUSTRIAL SYSTEMS CORP1 citations50
US9954135B2Apr 24, 2018
Solar cell manufacturing method
TOSHIBA MITSUBISHI ELECTRIC INDUSTRIAL SYSTEMS CORP0 citations50
SHIRAHATA TAKAHIRO
3 patentsUS9279182B2Mar 8, 2016
Apparatus for forming metal oxide film, method for forming metal oxide film, and metal oxide film
SHIRAHATA TAKAHIRO2 citations58
US10351957B2Jul 16, 2019
Method for producing metal oxide film and metal oxide film
SHIRAHATA TAKAHIRO0 citations48
US9598768B2Mar 21, 2017
Method of forming zinc oxide film (ZnO) or magnesium zinc oxide film (ZnMgO) and apparatus for forming zinc oxide film or magnesium zinc oxide film
SHIRAHATA TAKAHIRO0 citations36