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Inventor
OGASAWARA SYUNICHI
JP
2 patents
⚠️ This page may combine multiple inventors who share the name “OGASAWARA SYUNICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SHINETSU HANDOTAI KK
1 patent
US6135854A
Oct 24, 2000
Automatic workpiece transport apparatus for double-side polishing machine
SHINETSU HANDOTAI KK
71 citations
93
MIMASU SEMICONDUCTOR IND CO
1 patent
US7659212B2
Feb 9, 2010
Process control method in spin etching and spin etching apparatus
MIMASU SEMICONDUCTOR IND CO
8 citations
79