Inventor

SATO ARTHUR

US18 patents

⚠️ This page may combine multiple inventors who share the name “SATO ARTHUR”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SATO ARTHUR

LAM RES CORP

Determining a malfunctioning device in a plasma system

Radiofrequency adjustment for instability management in semiconductor processing

Radiofrequency adjustment for instability management in semiconductor processing

Systems and methods for applying frequency and match tuning in a non-overlapping manner for processing substrate

Determining a malfunctioning device in a plasma system

Hybrid edge ring for plasma wafer processing

Bypass capacitors for high voltage bias power in the mid frequency RF range

System, method and apparatus for RF power compensation in plasma etch chamber

Methods for automatically determining capacitor values and systems thereof

Systems and methods for improving wafer etch non-uniformity when using transformer-coupled plasma

APPLIED MATERIALS INC

Automatic frequency tuning of an RF power source of an inductively coupled plasma reactor

Plasma assisted processing chamber with separate control of species density

Capacitive probe for in situ measurement of wafer DC bias voltage

Method of measuring the amount of capacitive coupling of RF power in an inductively coupled plasma

Process chamber having a voltage distribution electrode

Capacitive probe for in situ measurement of wafer DC bias voltage

LONG MAOLIN

Current control in plasma processing systems

BROWN DANNY

Vacuum sealing radio frequency (RF) and low frequency conducting actuator