Inventor · disambiguated record

Jian-Bin Chiou

Also filed as: CHIOU JIAN-BIN

1 granted patent·0 citations·filing 2008–2008

10Inventor score

Technology areasC23C

Files withCHIOU JIAN-BIN1

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1 record

0145US8404135B2Plasma cleaning for process chamber component refurbishmentCHIOU JIAN-BIN·Filed 2008·Granted Mar 26, 2013·0 cites·12 claims

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