Inventor
YOO BEOM JIN
KR5 patents
Patents
5 patentsUS11107705B2Aug 31, 2021
Cleaning solution production systems and methods, and plasma reaction tanks
SAMSUNG ELECTRONICS CO LTD3 citations69
US11545372B2Jan 3, 2023
Plasma generator, cleaning liquid processing apparatus, semiconductor device cleaning apparatus, cleaning liquid processing method, and method of manufacturing semiconductor device
SAMSUNG ELECTRONICS CO LTD2 citations67
US10410874B2Sep 10, 2019
Plasma processing apparatus and method, and method of manufacturing semiconductor device using the same
SAMSUNG ELECTRONICS CO LTD5 citations67
US11664242B2May 30, 2023
Cleaning solution production systems and methods, and plasma reaction tanks
SAMSUNG ELECTRONICS CO LTD0 citations58
US10418250B2Sep 17, 2019
Etching method using remote plasma source, and method of fabricating semiconductor device including the etching method
SAMSUNG ELECTRONICS CO LTD0 citations47