Inventor
PASHKOVSKIY VASILY
KR7 patents
⚠️ This page may combine multiple inventors who share the name “PASHKOVSKIY VASILY”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAMSUNG ELECTRONICS CO LTD
6 patentsUS9601397B1Mar 21, 2017
Microwave probe, plasma monitoring system including the microwave probe, and method for fabricating semiconductor device using the system
SAMSUNG ELECTRONICS CO LTD4 citations71
US11798788B2Oct 24, 2023
Hollow cathode, an apparatus including a hollow cathode for manufacturing a semiconductor device, and a method of manufacturing a semiconductor device using a hollow cathode
SAMSUNG ELECTRONICS CO LTD2 citations69
US10950414B2Mar 16, 2021
Plasma processing apparatus and method of manufacturing semiconductor device using the same
SAMSUNG ELECTRONICS CO LTD2 citations69
US10410874B2Sep 10, 2019
Plasma processing apparatus and method, and method of manufacturing semiconductor device using the same
SAMSUNG ELECTRONICS CO LTD5 citations67
US10566176B2Feb 18, 2020
Microwave probe, plasma monitoring system including the microwave probe, and method for fabricating semiconductor device using the system
SAMSUNG ELECTRONICS CO LTD0 citations50
US7804250B2Sep 28, 2010
Apparatus and method to generate plasma
SAMSUNG ELECTRONICS CO LTD0 citations42