Inventor
COX MICHAEL SANTIAGO
US4 patents
Patents
4 patentsUS6869880B2Mar 22, 2005
In situ application of etch back for improved deposition into high-aspect-ratio features
APPLIED MATERIALS INC241 citations98
US6863019B2Mar 8, 2005
Semiconductor device fabrication chamber cleaning method and apparatus with recirculation of cleaning gas
APPLIED MATERIALS INC608 citations98
US6364958B1Apr 2, 2002
Plasma assisted semiconductor substrate processing chamber having a plurality of ground path bridges
APPLIED MATERIALS INC43 citations92
US7399707B2Jul 15, 2008
In situ application of etch back for improved deposition into high-aspect-ratio features
APPLIED MATERIALS INC3 citations62