Inventor
MAQUIN PHILIPPE
FR3 patents
Patents
3 patentsUS6419455B1Jul 16, 2002
System for regulating pressure in a vacuum chamber, vacuum pumping unit equipped with same
CIT ALCATEL65 citations91
US6643014B2Nov 4, 2003
Method and a system for identifying gaseous effluents, and a facility provided with such a system
CIT ALCATEL23 citations90
US7998426B2Aug 16, 2011
Plasma-based gas treatment system integrated in a vacuum pump
CIT ALCATEL1 citations48