Inventor
PATEL NITAL
US3 patents
Patents
3 patentsUS6808942B1Oct 26, 2004
Method for controlling a critical dimension (CD) in an etch process
TEXAS INSTRUMENTS INC20 citations86
US6799136B2Sep 28, 2004
Method of estimation of wafer polish rates
TEXAS INSTRUMENTS INC10 citations71
US6589800B2Jul 8, 2003
Method of estimation of wafer-to-wafer thickness
TEXAS INSTRUMENTS INC8 citations71