Inventor

UDOU HIDEAKI

JP2 patents

Patents

2 patents

US9865452B2Jan 9, 2018

Substrate processing method and substrate processing apparatus

TOKYO ELECTRON LTD0 citations46

US12300518B2May 13, 2025

Substrate processing apparatus and substrate processing method having enhanced configuration of replenishing processing liquid

TOKYO ELECTRON LTD0 citations41