Inventor
YOON JEONG-GOO
KR3 patents
Patents
3 patentsUS7074652B2Jul 11, 2006
Method for separating sapphire wafer into chips
SAMSUNG ELECTRO MECH18 citations77
US6864154B2Mar 8, 2005
Process for lapping wafer and method for processing backside of wafer using the same
SAMSUNG ELECTRO MECH5 citations59
US6572454B1Jun 3, 2003
Apparatus and method of conditioning polishing pads of chemical-mechanical polishing system
SAMSUNG ELECTRO MECH1 citations49