Inventor
KOBAYASHI TAKENOBU
JP4 patents
⚠️ This page may combine multiple inventors who share the name “KOBAYASHI TAKENOBU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CANON KK
3 patentsUS7668343B2Feb 23, 2010
Surface position measuring method and apparatus
CANON KK1 citations48
US7539328B2May 26, 2009
Surface position measuring method and apparatus
CANON KK1 citations48
US7663732B2Feb 16, 2010
Exposure apparatus, exposure method and device manufacturing method for compensating position measuring system using temperature
CANON KK0 citations44