Inventor

AKAMATSU YASUHIKO

JP5 patents

⚠️ This page may combine multiple inventors who share the name “AKAMATSU YASUHIKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

AKAMATSU YASUHIKO

2 patents

US8221594B2Jul 17, 2012

Magnetron sputtering apparatus and magnetron sputtering method

AKAMATSU YASUHIKO0 citations41

US8172993B2May 8, 2012

Magnetron sputtering electrode, and sputtering apparatus provided with magnetron sputtering electrode

AKAMATSU YASUHIKO1 citations41

RENESAS ELECTRONICS CORP

1 patent

US7863125B2Jan 4, 2011

Manufacturing method of CMOS type semiconductor device, and CMOS type semiconductor device

RENESAS ELECTRONICS CORP3 citations61

ULVAC INC

1 patent

US11935936B2Mar 19, 2024

Aluminum alloy film, method of producing the same, and thin film transistor

ULVAC INC1 citations54

RENESAS TECH CORP

1 patent

US7569890B2Aug 4, 2009

Manufacturing method of CMOS type semiconductor device, and CMOS type semiconductor device

RENESAS TECH CORP0 citations51