Inventor

HOLTERMAN JAN

NL2 patents

⚠️ This page may combine multiple inventors who share the name “HOLTERMAN JAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASML NETHERLANDS BV

1 patent

US6791664B2Sep 14, 2004

Lithographic apparatus, device manufacturing method, and device manufacturing thereby

ASML NETHERLANDS BV17 citations78

ROUWELER FRANCISCUS WILHELMUS

1 patent

US8943870B2Feb 3, 2015

Device for clamping a tool

ROUWELER FRANCISCUS WILHELMUS5 citations66