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Inventor
NOZAKI YOSHIKAZU
US
4 patents
⚠️ This page may combine multiple inventors who share the name “NOZAKI YOSHIKAZU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ANELVA CORP
2 patents
US7159537B2
Jan 9, 2007
Device for fixing a gas showerhead or target plate to an electrode in plasma processing systems
ANELVA CORP
54 citations
94
US7164571B2
Jan 16, 2007
Wafer stage with a magnet
ANELVA CORP
5 citations
60
CANON ANELVA CORP
1 patent
US7849815B2
Dec 14, 2010
Plasma processing apparatus
CANON ANELVA CORP
4 citations
60
FUJITSU LTD
1 patent
US7457238B2
Nov 25, 2008
Transmission system with congestion state-based flow control
FUJITSU LTD
4 citations
54