Inventor

HO KIAN SENG

SG3 patents

Patents

3 patents

US6779386B2Aug 24, 2004

Method and apparatus for detecting topographical features of microelectronic substrates

MICRON TECHNOLOGY INC14 citations90

US6923045B2Aug 2, 2005

Method and apparatus for detecting topographical features of microelectronic substrates

MICRON TECHNOLOGY INC11 citations71

US7213447B2May 8, 2007

Method and apparatus for detecting topographical features of microelectronic substrates

MICRON TECHNOLOGY INC1 citations50