Inventor
NAKAYAMA Chisayo
JP7 patents
Patents
7 patentsUS11107698B2Aug 31, 2021
Substrate treating method
SCREEN HOLDINGS CO LTD2 citations71
US10941492B2Mar 9, 2021
Substrate treating method
SCREEN HOLDINGS CO LTD0 citations60
US10955745B2Mar 23, 2021
Exposure device, substrate processing apparatus, exposure method and substrate processing method
SCREEN HOLDINGS CO LTD0 citations50
US10900126B2Jan 26, 2021
Substrate treating method and apparatus used therefor
SCREEN HOLDINGS CO LTD0 citations50
US10444636B2Oct 15, 2019
Exposure device substrate processing apparatus, exposure method of substrate and substrate processing method
SCREEN HOLDINGS CO LTD0 citations38
US10401736B2Sep 3, 2019
Exposure device, substrate processing apparatus, exposure method of substrate and substrate processing method
SCREEN HOLDINGS CO LTD0 citations38
US10539877B2Jan 21, 2020
Developing method
SCREEN HOLDINGS CO LTD0 citations37