Inventor

SHEN CHING-KAI

TW17 patents

⚠️ This page may combine multiple inventors who share the name “SHEN CHING-KAI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SHEN CHING-KAI

TAIWAN SEMICONDUCTOR MFG CO LTD

MEMS device with enhanced sensing structure and manufacturing method thereof

Method of forming dielectric and metal sealing layers on capping structure of a MEMs device

Wafer level integrated MEMS device enabled by silicon pillar and smart cap

Semiconductor structure and manufacturing method for the same

Wafer level integrated MEMS device enabled by silicon pillar and smart cap

Method for manufacturing semiconductor structure

Semiconductor structure and method for forming the same

Semiconductor structure and method for manufacturing thereof

Semiconductor device and manufacturing method of semiconductor device

MEMS device and method for making the same

Wafer level integrated MEMS device enabled by silicon pillar and smart cap

Micro electro mechanical system (MEMs) device having metal sealing on necking portion of vent hole

Method for manufacturing semiconductor device

Layer for buffer semiconductor device including microelectromechnical system (MEMS) device

Semiconductor device and manufacturing method thereof

Micro-electromechanical systems (MEMS) device with outgas layer

SHEN CHING-KAI

Capacitive accelerometer