Inventor
ALTAMIRANO SANCHEZ EFRAIN
BE11 patents
⚠️ This page may combine multiple inventors who share the name “ALTAMIRANO SANCHEZ EFRAIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IMEC VZW
10 patentsUS9520298B2Dec 13, 2016
Plasma method for reducing post-lithography line width roughness
IMEC VZW2 citations59
US11527431B2Dec 13, 2022
Methods of semiconductor device processing
IMEC VZW0 citations54
US10978335B2Apr 13, 2021
Method for producing a gate cut structure on an array of semiconductor fins
IMEC VZW0 citations51
US12237207B2Feb 25, 2025
Method for forming a buried metal line in a semiconductor substrate
IMEC VZW0 citations50
US11430697B2Aug 30, 2022
Method of forming a mask layer
IMEC VZW0 citations50
US11430876B2Aug 30, 2022
Method for producing self-aligned gate and source/drain via connections for contacting a FET transistor
IMEC VZW0 citations47
US10493378B2Dec 3, 2019
Method of forming micro-pipes on a substrate and a structure formed thereof
IMEC VZW0 citations47
US10825682B2Nov 3, 2020
Method for producing a pillar structure in a semiconductor layer
IMEC VZW0 citations40
US10784158B2Sep 22, 2020
Area-selective deposition of a tantalum silicide TaSix mask material
IMEC VZW0 citations40
US10782607B2Sep 22, 2020
Reticles for lithography
IMEC VZW0 citations40