Inventor

CHAMBERLAIN JEFFERY P

US2 patents

Patents

2 patents

US7238618B2Jul 3, 2007

System for the preferential removal of silicon oxide

CABOT MICROELECTRONICS CORP9 citations70

US7365013B2Apr 29, 2008

System for the preferential removal of silicon oxide

CABOT MICROELECTRONICS CORP0 citations48