Inventor
TAMAMUSHI GEN
JP10 patents
Patents
10 patentsUS11443924B2Sep 13, 2022
Upper electrode and plasma processing apparatus
TOKYO ELECTRON LTD2 citations72
US11227773B2Jan 18, 2022
Method for controlling electrostatic chuck and plasma processing apparatus
TOKYO ELECTRON LTD3 citations69
US12057294B2Aug 6, 2024
Plasma processing apparatus and plasma processing method
TOKYO ELECTRON LTD1 citations62
US12087591B2Sep 10, 2024
Plasma processing apparatus and system
TOKYO ELECTRON LTD1 citations61
US11315793B2Apr 26, 2022
Etching method and plasma processing apparatus
TOKYO ELECTRON LTD0 citations61
US12125679B2Oct 22, 2024
Plasma processing apparatus and processing method
TOKYO ELECTRON LTD1 citations58
US10886135B2Jan 5, 2021
Substrate processing method and substrate processing apparatus
TOKYO ELECTRON LTD0 citations51
US10943766B2Mar 9, 2021
Power feed member and substrate processing apparatus
TOKYO ELECTRON LTD0 citations49
US12476080B2Nov 18, 2025
Plasma processing apparatus, power supply system, control method, program, and storage medium
TOKYO ELECTRON LTD0 citations48
US11984303B2May 14, 2024
Holding method of edge ring, plasma processing apparatus, and substrate processing system
TOKYO ELECTRON LTD0 citations48