Inventor
ZELLER ROBERT S
US13 patents
⚠️ This page may combine multiple inventors who share the name “ZELLER ROBERT S”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MILLIPORE CORP
5 patentsUS5487771AJan 30, 1996
High-efficiency metal membrane element, filter, and process for making
MILLIPORE CORP68 citations95
US5456740AOct 10, 1995
High-efficiency metal membrane getter element and process for making
MILLIPORE CORP75 citations93
US5814272ASep 29, 1998
Method for forming dendritic metal particles
MILLIPORE CORP24 citations91
US6197085B1Mar 6, 2001
Method for forming titanium anisotropic metal particles
MILLIPORE CORP3 citations72
US6193778B1Feb 27, 2001
Method for forming chromium anisotropic metal particles
MILLIPORE CORP6 citations72
MYKROLIS CORP
4 patentsUS6623543B1Sep 23, 2003
Method for forming titanium anisotropic metal particles
MYKROLIS CORP39 citations94
US6540809B1Apr 1, 2003
Method for forming chromium anisotropic metal particles
MYKROLIS CORP4 citations72
US6770113B2Aug 3, 2004
Method for forming anisotrophic metal particles
MYKROLIS CORP3 citations61
US6964693B2Nov 15, 2005
Method for forming chromium anisotropic metal particles
MYKROLIS CORP0 citations51
ENTEGRIS INC
2 patentsUS7879137B2Feb 1, 2011
Lithographic projection apparatus, purge gas supply system and gas purging method
ENTEGRIS INC7 citations83
US11273492B2Mar 15, 2022
Sintered porous material having nodes and fibers of different materials, with different sintering points, and related methods of preparation and use
ENTEGRIS INC0 citations62