Inventor

HARTWIG SARAH

US2 patents

Patents

2 patents

US7055212B2Jun 6, 2006

Clean gas injector system for reactor chamber

TEXAS INSTRUMENTS INC3 citations49

US6790777B2Sep 14, 2004

Method for reducing contamination, copper reduction, and depositing a dielectric layer on a semiconductor device

TEXAS INSTRUMENTS INC0 citations30