Inventor
ENDOU MUTSUKO
JP2 patents
Patents
2 patentsUS7043394B2May 9, 2006
Method and device for measuring fine particles in ultrapure water
NOMURA MICRO SCIENCE KK4 citations52
US7805983B2Oct 5, 2010
Method for measuring the number of fine particles in ultrapure water and method for manufacturing a filtration device for measuring the number of fine particles in ultrapure water
NOMURA MICRO SCIENCE KK1 citations39