Inventor
LOH STEPHEN K
US6 patents
⚠️ This page may combine multiple inventors who share the name “LOH STEPHEN K”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
4 patentsUS6057220AMay 2, 2000
Titanium polycide stabilization with a porous barrier
IBM36 citations92
US6639264B1Oct 28, 2003
Method and structure for surface state passivation to improve yield and reliability of integrated circuit structures
IBM18 citations81
US7361584B2Apr 22, 2008
Detection of residual liner materials after polishing in damascene process
IBM0 citations51
US7101817B2Sep 5, 2006
System and method for determining line widths of free-standing structures resulting from a semiconductor manufacturing process
IBM0 citations48
SIEMENS AG
2 patentsUS6228701B1May 8, 2001
Apparatus and method for minimizing diffusion in stacked capacitors formed on silicon plugs
SIEMENS AG38 citations92
US5998253ADec 7, 1999
Method of forming a dopant outdiffusion control structure including selectively grown silicon nitride in a trench capacitor of a DRAM cell
SIEMENS AG40 citations91