Inventor
EGAWA HIROMI
JP3 patents
⚠️ This page may combine multiple inventors who share the name “EGAWA HIROMI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
JSR CORP
2 patentsUS7399715B2Jul 15, 2008
Organic silica-based film, method of forming the same, composition for forming insulating film for semiconductor device, interconnect structure, and semiconductor device
JSR CORP30 citations90
US7932295B2Apr 26, 2011
Organic silica-based film, method of forming the same, composition for forming insulating film for semiconductor device, interconnect structure, and semiconductor device
JSR CORP9 citations82