Inventor

BABIC DARKO

US4 patents

⚠️ This page may combine multiple inventors who share the name “BABIC DARKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

VERGHESE MOHITH

2 patents

US9359672B2Jun 7, 2016

Reaction system for growing a thin film

VERGHESE MOHITH14 citations90

US8211230B2Jul 3, 2012

Reaction system for growing a thin film

VERGHESE MOHITH31 citations90

ASM INC

1 patent

US10468291B2Nov 5, 2019

Reaction system for growing a thin film

ASM INC11 citations83

TOKYO ELECTRON LTD

1 patent

US7582181B2Sep 1, 2009

Method and system for controlling a velocity field of a supercritical fluid in a processing system

TOKYO ELECTRON LTD16 citations80