Inventor

LEE JARED AHMAD

US38 patents

⚠️ This page may combine multiple inventors who share the name “LEE JARED AHMAD”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LEE JARED AHMAD

APPLIED MATERIALS INC

Method and apparatus for controlling gas flow to a processing chamber

Method and apparatus for controlling gas flow to a processing chamber

Plasma erosion resistant thin film coating for high temperature application

Plasma erosion resistant thin film coating for high temperature application

Thin heated substrate support

Method and apparatus for gas flow measurement

Method and apparatus for gas flow measurement

Thermally uniform deposition station

Gas distribution plate for thermal deposition

Abatement and strip process chamber in a load lock configuration

Plasma source with ceramic electrode plate

Vertically adjustable plasma source

Abatement and strip process chamber in a load lock configuration

Enhanced spatial ALD of metals through controlled precursor mixing

Plasma erosion resistant thin film coating for high temperature application

Gas distribution plate for thermal deposition

Method and apparatus for substrate transfer and radical confinement

Spatial wafer processing with improved temperature uniformity

Abatement and strip process chamber in a dual loadlock configuration

Abatement and strip process chamber in a dual load lock configuration

Enhanced spatial ALD of metals through controlled precursor mixing

Abatement and strip process chamber in a load lock configuration

Segmented focus ring assembly

Vertically adjustable plasma source

Spatial wafer processing with improved temperature uniformity

Substrate placement detection in semiconductor equipment using thermal response characteristics

Methods and apparatus for providing a gas mixture to a pair of process chambers

Method and apparatus for substrate transfer and radical confinement

Apparatus for uniform pumping within a substrate process chamber

Particle reduction via throttle gate valve purge

LEE JARED AHMAD

Method and apparatus for substrate transfer and radical confinement

Abatement and strip process chamber in a dual loadlock configuration

Methods and apparatus for providing a gas mixture to a pair of process chambers

Apparatus for radial delivery of gas to a chamber and methods of use thereof

DIAZ ADAUTO

Method for removing halogen-containing residues from substrate

Method extending the service interval of a gas distribution plate

GOLD EZRA ROBERT

Method and apparatus for controlling gas flow to a processing chamber

CRUSE JAMES P

Methods and apparatus for calibrating pressure gauges in a substrate processing system