Inventor
KASHYAP DHRITIMAN SUBHA
IN20 patents
⚠️ This page may combine multiple inventors who share the name “KASHYAP DHRITIMAN SUBHA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
19 patentsUSD1037778SAug 6, 2024
Gas distribution plate
APPLIED MATERIALS INC13 citations83
US11430686B2Aug 30, 2022
Pedestal heater for spatial multi-wafer processing tool
APPLIED MATERIALS INC5 citations83
USD1080812SJun 24, 2025
Gas mixer
APPLIED MATERIALS INC6 citations81
US11584993B2Feb 21, 2023
Thermally uniform deposition station
APPLIED MATERIALS INC4 citations74
US11110425B2Sep 7, 2021
Gas distribution plate for thermal deposition
APPLIED MATERIALS INC4 citations73
US11818810B2Nov 14, 2023
Heater assembly with purge gap control and temperature uniformity for batch processing chambers
APPLIED MATERIALS INC2 citations71
US11682576B2Jun 20, 2023
Pedestal heater for spatial multi-wafer processing tool
APPLIED MATERIALS INC0 citations62
US11583816B2Feb 21, 2023
Gas distribution plate for thermal deposition
APPLIED MATERIALS INC1 citations62
US11586789B2Feb 21, 2023
Machine learning based smart process recipe builder to improve azimuthal flow and thickness uniformity
APPLIED MATERIALS INC1 citations62
US11479855B2Oct 25, 2022
Spatial wafer processing with improved temperature uniformity
APPLIED MATERIALS INC0 citations62
US10910243B2Feb 2, 2021
Thermal management system
APPLIED MATERIALS INC0 citations62
USD1103948SDec 2, 2025
Gas distribution plate
APPLIED MATERIALS INC0 citations61
USD1104086SDec 2, 2025
Gas distribution plate
APPLIED MATERIALS INC0 citations61
US11098404B2Aug 24, 2021
Multi-station chamber lid with precise temperature and flow control
APPLIED MATERIALS INC1 citations61
US11549183B2Jan 10, 2023
Showerhead with inlet mixer
APPLIED MATERIALS INC0 citations60
US11769684B2Sep 26, 2023
Wafer heater with backside and integrated bevel purge
APPLIED MATERIALS INC0 citations59
US10787739B2Sep 29, 2020
Spatial wafer processing with improved temperature uniformity
APPLIED MATERIALS INC0 citations52
US12442079B2Oct 14, 2025
Dual channel showerhead assembly
APPLIED MATERIALS INC0 citations45
US12308218B2May 20, 2025
Thermal shield for processing chamber
APPLIED MATERIALS INC0 citations45