Inventor

RICE MICHAEL

US81 patents

⚠️ This page may combine multiple inventors who share the name “RICE MICHAEL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

RICE MICHAEL

APPLIED MATERIALS INC

Method for depositing an amorphous carbon layer

Inductively coupled RF plasma reactor having an overhead solenoidal antenna

Plasma reactor having an inductive antenna coupling power through a parallel plate electrode

Inductively coupled RF plasma reactor having an overhead solenoidal antenna and modular confinement magnet liners

Parallel plate electrode plasma reactor having an inductive antenna and adjustable radial distribution of plasma ion density

Cluster tool architecture for processing a substrate

Method of depositing an amorphous carbon layer

Plasma reactor having an inductive antenna coupling power through a parallel plate electrode

High pressure high non-reactive diluent gas content high plasma ion density plasma oxide etch process

Thermal control apparatus for inductively coupled RF plasma reactor having an overhead solenoidal antenna

Plasma reactor with heated source of a polymer-hardening precursor material

Cluster tool architecture for processing a substrate

Cluster tool architecture for processing a substrate

Method of depositing an amorphous carbon layer

Inductively coupled RF plasma reactor having an antenna adjacent a window electrode

Process chamber having improved temperature control

Plasma reactor with heated source of a polymer-hardening precursor material

Plasma etch apparatus with heated scavenging surfaces

Plasma etch apparatus with heated scavenging surfaces

Method for determining a position of a robot

Parallel-plate electrode plasma reactor having an inductive antenna and adjustable radial distribution of plasma ion density

Inductively coupled RF Plasma reactor having an overhead solenoidal antenna and modular confinement magnet liners

Plasma reactor having a dual mode RF power application

Wafer position error detection and correction system

Clamp ring for domed pedestal in wafer processing chamber

Vision system

Method for determining a position of a robot

Method of depositing an amorphous carbon layer

Thermal control apparatus for inductively coupled RF plasma reactor having an overhead solenoidal antenna

Plasma reactor with heated source of a polymer-hardening precursor material

Plasma reactor with heated source of a polymer-hardening precursor material

Plasma reactor with heated source of a polymer-hardening precursor material

Protective collar for vacuum seal in a plasma etch reactor

Vision system

Apparatus and method for attaining repeatable temperature versus time profiles for plasma heated interactive parts used in mass production plasma processing

Substrate gripper for a substrate handling robot

ISHIKAWA TETSUYA

Cluster tool architecture for processing a substrate

Cluster tool architecture for processing a substrate

Cluster tool architecture for processing a substrate

Cluster tool architecture for processing a substrate

(unassigned)

Enhancement of silicon oxide etch rate and nitride selectivity using hexafluorobutadiene or other heavy perfluorocarbon

Inductively coupled RF plasma reactor and plasma chamber enclosure structure therefor

Plasma reactor having RF power applicator and a dual-purpose window

SOKUDO CO LTD

Cluster tool architecture for processing a substrate

APPLIED MATERIELS INC

Vacuum processing chamber having multi-mode access

L 3 COMM CORP

Hybrid multiple access waveform, method, and apparatus

L3 COMM CORP

Adaptive power amplifier linearization in time division duplex communication systems

APPLIED MATERIAL INC

Vision system

SHEIKHZADEH-NADJAR HAMID

Method and system for managing physiological system

BIOLOGISTEX CCM LLC

Biologic stability, delivery logistics and administration of time and/or temperature sensitive biologic based materials