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Inventor
BREULS TON
NL
2 patents
Patents
2 patents
US10767264B2
Sep 8, 2020
Method and an apparatus for performing a plasma chemical vapour deposition process and a method
DRAKA COMTEQ BV
2 citations
69
US12467142B2
Nov 11, 2025
Method and an apparatus for performing a plasma chemical vapour deposition process and a method
DRAKA COMTEQ BV
0 citations
59