Inventor

DRUMMOND STEVE

US3 patents

⚠️ This page may combine multiple inventors who share the name “DRUMMOND STEVE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LEE WILLIAM D

2 patents

US9711324B2Jul 18, 2017

Inert atmospheric pressure pre-chill and post-heat

LEE WILLIAM D5 citations68

US8692215B2Apr 8, 2014

Heated rotary seal and bearing for chilled ion implantation system

LEE WILLIAM D0 citations37

AXCELIS TECH INC

1 patent

US7751172B2Jul 6, 2010

Sliding wafer release gripper/wafer peeling gripper

AXCELIS TECH INC11 citations76