Inventor
KIM JUNGAH
KR4 patents
⚠️ This page may combine multiple inventors who share the name “KIM JUNGAH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAMSUNG ELECTRONICS CO LTD
3 patentsUS11028488B2Jun 8, 2021
Etching composition, a method of etching a metal barrier layer and a metal layer using the same, and method of manufacturing semiconductor device using the same
SAMSUNG ELECTRONICS CO LTD3 citations71
US11795550B2Oct 24, 2023
Etching composition, a method of etching a metal barrier layer and a metal layer using the same, and method of manufacturing semiconductor device using the same
SAMSUNG ELECTRONICS CO LTD1 citations61
US11437246B2Sep 6, 2022
Etchant compositions and methods of manufacturing integrated circuit devices using the same
SAMSUNG ELECTRONICS CO LTD0 citations52