Inventor

CAHILL JAMES M

US5 patents

⚠️ This page may combine multiple inventors who share the name “CAHILL JAMES M”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

2 patents

US7042580B1May 9, 2006

Apparatus for imaging metrology

TOKYO ELECTRON LTD10 citations73

US7177019B2Feb 13, 2007

Apparatus for imaging metrology

TOKYO ELECTRON LTD6 citations62

THERMA WAVE INC

1 patent

US6563586B1May 13, 2003

Wafer metrology apparatus and method

THERMA WAVE INC44 citations95

(unassigned)

1 patent

US6212741B1Apr 10, 2001

Packaged item location, identification and control device and method

20 citations88

ALLSTEEL INC

1 patent

US5488808AFeb 6, 1996

Interlock for wall panel system

ALLSTEEL INC51 citations86