Inventor

JEWELL THOMAS G

US3 patents

⚠️ This page may combine multiple inventors who share the name “JEWELL THOMAS G”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LAM RES CORP

2 patents

US10633742B2Apr 28, 2020

Use of voltage and current measurements to control dual zone ceramic pedestals

LAM RES CORP6 citations81

US11028482B2Jun 8, 2021

Use of voltage and current measurements to control dual zone ceramic pedestals

LAM RES CORP3 citations70

CHANDRASEKHARAN RAMESH

1 patent

US8985152B2Mar 24, 2015

Point of use valve manifold for semiconductor fabrication equipment

CHANDRASEKHARAN RAMESH5 citations66