Inventor
MAZZOCCO JOHN JOSEPH
US4 patents
Patents
4 patentsUS11830710B2Nov 28, 2023
Internally divisible process chamber using a shutter disk assembly
APPLIED MATERIALS INC0 citations59
US11545347B2Jan 3, 2023
Internally divisible process chamber using a shutter disk assembly
APPLIED MATERIALS INC0 citations59
US11170982B2Nov 9, 2021
Methods and apparatus for producing low angle depositions
APPLIED MATERIALS INC0 citations49
US11361950B2Jun 14, 2022
Multi-cathode processing chamber with dual rotatable shields
APPLIED MATERIALS INC0 citations38