Inventor

TAKAGI SAE

JP2 patents

Patents

2 patents

US6009828AJan 4, 2000

Method for forming a thin semiconductor film and a plasma CVD apparatus to be used in the method

SHARP KK21 citations91

US5618758AApr 8, 1997

Method for forming a thin semiconductor film and a plasma CVD apparatus to be used in the method

SHARP KK12 citations72