Inventor
CHING TUNG-CHIA
TW2 patents
Patents
2 patentsUS6010942AJan 4, 2000
Post chemical mechanical polishing, clean procedure, used for fabrication of a crown shaped capacitor structure
VANGUARD INT SEMICONDUCT CORP40 citations88
US6046084AApr 4, 2000
Isotropic etching of a hemispherical grain silicon layer to improve the quality of an overlying dielectric layer
VANGUARD INT SEMICONDUCT CORP19 citations77