Inventor
EYRING STEFAN
DE15 patents
⚠️ This page may combine multiple inventors who share the name “EYRING STEFAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA CORP
10 patentsUS11862524B2Jan 2, 2024
Overlay mark design for electron beam overlay
KLA CORP2 citations71
US11508551B2Nov 22, 2022
Detection and correction of system responses in real-time
KLA CORP2 citations70
US11209737B1Dec 28, 2021
Performance optimized scanning sequence for eBeam metrology and inspection
KLA CORP5 citations69
US12085385B2Sep 10, 2024
Design-assisted large field of view metrology
KLA CORP0 citations61
US12055859B2Aug 6, 2024
Overlay mark design for electron beam overlay
KLA CORP0 citations60
US11894214B2Feb 6, 2024
Detection and correction of system responses in real-time
KLA CORP0 citations59
US11703767B2Jul 18, 2023
Overlay mark design for electron beam overlay
KLA CORP0 citations58
US11720031B2Aug 8, 2023
Overlay design for electron beam and scatterometry overlay measurements
KLA CORP0 citations50
US11481922B2Oct 25, 2022
Online navigational drift correction for metrology measurements
KLA CORP0 citations50
US12444628B2Oct 14, 2025
Image modeling-assisted contour extraction
KLA CORP0 citations48
KLA TENCOR CORP
5 patentsUS10473460B2Nov 12, 2019
Overlay measurements of overlapping target structures based on symmetry of scanning electron beam signals
KLA TENCOR CORP20 citations91
US10474040B2Nov 12, 2019
Systems and methods for device-correlated overlay metrology
KLA TENCOR CORP4 citations71
US10185800B2Jan 22, 2019
Apparatus and method for the measurement of pattern placement and size of pattern and computer program therefor
KLA TENCOR CORP3 citations71
US9704238B2Jul 11, 2017
Method for correcting position measurements for optical errors and method for determining mask writer errors
KLA TENCOR CORP5 citations70
US9201312B2Dec 1, 2015
Method for correcting position measurements for optical errors and method for determining mask writer errors
KLA TENCOR CORP3 citations60