Inventor
OIKAWA SHO
JP4 patents
Patents
4 patentsUS11211229B2Dec 28, 2021
Processing method and plasma processing apparatus
TOKYO ELECTRON LTD2 citations68
US11328934B2May 10, 2022
Etching method and substrate processing apparatus
TOKYO ELECTRON LTD0 citations55
US11610766B2Mar 21, 2023
Target object processing method and plasma processing apparatus
TOKYO ELECTRON LTD0 citations48
US11721595B2Aug 8, 2023
Processing method and plasma processing apparatus
TOKYO ELECTRON LTD0 citations47