Inventor
KAWASAKI SHUNICHI
JP4 patents
⚠️ This page may combine multiple inventors who share the name “KAWASAKI SHUNICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
3 patentsUS11211229B2Dec 28, 2021
Processing method and plasma processing apparatus
TOKYO ELECTRON LTD2 citations68
US11610766B2Mar 21, 2023
Target object processing method and plasma processing apparatus
TOKYO ELECTRON LTD0 citations48
US11721595B2Aug 8, 2023
Processing method and plasma processing apparatus
TOKYO ELECTRON LTD0 citations47