Inventor

YEN YUNG-SUNG

TW81 patents

⚠️ This page may combine multiple inventors who share the name “YEN YUNG-SUNG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

YEN YUNG-SUNG

TAIWAN SEMICONDUCTOR MFG CO LTD

Method of fabricating semiconductor device with reduced trench distortions

Method of manufacturing semiconductor devices

Pattern fidelity enhancement

Method of manufacturing semiconductor devices

Pattern fidelity enhancement with directional patterning technology

Directional patterning methods

Power strap structure for high performance and low current density

Dual power structure with connection pins

Method of forming an interconnect structure for a semiconductor device

Pattern fidelity enhancement

Directional processing to remove a layer or a material formed over a substrate

Method of manufacturing semiconductor devices using directional process

Method of manufacturing semiconductor devices

Self aligned litho etch process patterning method

Power strap structure for high performance and low current density

Fine line patterning methods

Lithographic technique for feature cut by line-end shrink

Directional processing to remove a layer or a material formed over a substrate

Dual power structure with connection pins

Power strap structure for high performance and low current density

Method of fabricating semiconductor device with reduced trench distortions

Method of forming an interconnect structure for a semiconductor device

Lithographic technique for feature cut by line-end shrink

Method of semiconductor integrated circuit fabrication

Method of planarizing a film layer

Method of fabricating semiconductor device

Lithographic technique for feature cut by line-end shrink

Method for fabricating semiconductor device

Lithography process and system with enhanced overlay quality

Method of forming openings in a material layer

Method of manufacturing semiconductor devices

Method of manufacturing semiconductor devices

Method of manufacturing semiconductor devices

Dual power structure with connection pins

Semiconductor device and manufacturing method thereof

Method of fabricating semiconductor device

Designed-based interconnect structure in semiconductor structure

Method of fabricating semiconductor device with reduced trench distortions

Pattern fidelity enhancement

Method of manufacturing semiconductor devices using directional process

Method of manufacturing semiconductor devices

Lithography process monitoring method

Line-end extension method and device

Self aligned litho etch process patterning method

Directional deposition for semiconductor fabrication

Method of fabricating semiconductor device with reduced trench distortions

TAIWAN SEMICONDUCTOR MFG

Method of merging color sets of layout

Method of improving via filling uniformity in isolated and dense via-pattern regions

Semiconductor device with scattering bars adjacent conductive lines

CHEN PI-TSUNG

Decomposing integrated circuit layout