Inventor
ATANOS ASHUR J
US11 patents
⚠️ This page may combine multiple inventors who share the name “ATANOS ASHUR J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
8 patentsUS12270752B2Apr 8, 2025
EPI self-heating sensor tube as in-situ growth rate sensor
APPLIED MATERIALS INC0 citations62
US12243761B2Mar 4, 2025
Detection and analysis of substrate support and pre-heat ring in a process chamber via imaging
APPLIED MATERIALS INC0 citations61
US12592363B2Mar 31, 2026
Actively controlled gas inject for process temperature control
APPLIED MATERIALS INC0 citations59
US12456614B2Oct 28, 2025
Process kits and related methods for processing chambers to facilitate deposition process adjustability
APPLIED MATERIALS INC0 citations59
US12354855B2Jul 8, 2025
Process kits and related methods for processing chambers to facilitate deposition process adjustability
APPLIED MATERIALS INC0 citations59
US12417890B2Sep 16, 2025
Methods, systems, and apparatus for monitoring radiation output of lamps
APPLIED MATERIALS INC0 citations50
US12519005B2Jan 6, 2026
Thickness uniformity improvement kit for thermally sensitive epitaxial processing
APPLIED MATERIALS INC0 citations49
US12221696B2Feb 11, 2025
Process kits and related methods for processing chambers to facilitate deposition process adjustability
APPLIED MATERIALS INC0 citations49