Inventor

GRÄUPNER PAUL

DE2 patents

⚠️ This page may combine multiple inventors who share the name “GRÄUPNER PAUL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ZEISS CARL SMT GMBH

1 patent

US9146475B2Sep 29, 2015

Projection exposure system and projection exposure method

ZEISS CARL SMT GMBH3 citations60

ASML NETHERLANDS BV

1 patent

US9285685B2Mar 15, 2016

Lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV0 citations50