Inventor
TRAN VINH N
US4 patents
Patents
4 patentsUS12456614B2Oct 28, 2025
Process kits and related methods for processing chambers to facilitate deposition process adjustability
APPLIED MATERIALS INC0 citations59
US12354855B2Jul 8, 2025
Process kits and related methods for processing chambers to facilitate deposition process adjustability
APPLIED MATERIALS INC0 citations59
US12221696B2Feb 11, 2025
Process kits and related methods for processing chambers to facilitate deposition process adjustability
APPLIED MATERIALS INC0 citations49
US11948818B2Apr 2, 2024
Temperature calibration with deposition and etch process
APPLIED MATERIALS INC0 citations49